Piezoelectric thin film having a high piezoelectric constant and a low leak current Piezoelectric thin film having a high piezoelectric constant and a low leak current

Solicitante: Hitachi Cable, Ltd.

Nº Pub.: US20138450911

To provide a piezoelectric thin film element comprising: a piezoelectric thin film on a substrate, having an alkali-niobium oxide-based perovskite structure expressed by a composition formula (K1-xNax)yNbO3, wherein composition ratios x, y of the piezoelectric thin film expressed by (K1-xNax)yNbO3 are in a range of 0.4≦x≦0.7 and 0.7≦y≦0.94.